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Journal: Appl. Sci., 2023
Volume: 13
Number: 1738

Article: Defocus Effect Correction for Back Focal Plane Ellipsometry for Antivibration Measurement of Thin Films
Authors: by Jian Wang, Jun Yang, Lihua Peng, Dawei Tang, Feng Gao, Rong Chen and Liping Zhou
Link: https://www.mdpi.com/2076-3417/13/3/1738

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