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Journal: Appl. Sci., 2023
Volume: 13
Number: 9482

Article: Development of a Magnetic Levitation Wafer Handling Robot Transfer System with High-Accuracy and High-Cleanliness: Experimental Evaluation
Authors: by Chang-Wan Ha, Sungho Jung, Jinseong Park and Jaewon Lim
Link: https://www.mdpi.com/2076-3417/13/16/9482

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