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Journal: Appl. Sci., 2022
Volume: 12
Number: 3571
Article:
Characteristics of TiN Thin Films Deposited by Substrate Temperature Variables Using Scanning Acoustic Microscopy
Authors:
by
Dongchan Kang, Young Sung Kim, Jeong Nyeon Kim and Ik Keun Park
Link:
https://www.mdpi.com/2076-3417/12/7/3571
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