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Journal: Appl. Sci., 2022
Volume: 12
Number: 3571

Article: Characteristics of TiN Thin Films Deposited by Substrate Temperature Variables Using Scanning Acoustic Microscopy
Authors: by Dongchan Kang, Young Sung Kim, Jeong Nyeon Kim and Ik Keun Park
Link: https://www.mdpi.com/2076-3417/12/7/3571

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