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Journal: Appl. Sci., 2022
Volume: 12
Number: 10010

Article: An Exploration into Damage Repair and Manufacturing Technology of Photomask Glass Substrates
Authors: by Bo Wang, Feng Shi, Guipeng Tie, Ci Song and Shuangpeng Guo
Link: https://www.mdpi.com/2076-3417/12/19/10010

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