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Journal: Appl. Sci., 2021
Volume: 11
Number: 4235
Article:
SLLB-DEVS: An Approach for DEVS Based Modeling of Semiconductor Lithography Load Balance
Authors:
by
Young Shin Han, Bo Seung Kwon, Choon Sung Nam and Jong Sik Lee
Link:
https://www.mdpi.com/2076-3417/11/9/4235
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