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Journal: Appl. Sci., 2021
Volume: 11
Number: 10748

Article: Numerical Investigation of the Effects of the Beam Scanning Pattern and Overlap on the Temperature Distribution during the Laser Dopant Activation Anneal Process
Authors: by Donghyeok Choi and Joonghan Shin
Link: https://www.mdpi.com/2076-3417/11/22/10748

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