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Open AccessArticle

Measurement of Structural Loads Using a Novel MEMS Extrinsic Fabry–Perot Strain Sensor

1
State Key Laboratory of Mechanics and Control of Mechanical Structures, Nanjing University of Aeronautics and Astronautics, Nanjing 210016, China
2
State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China
*
Author to whom correspondence should be addressed.
Appl. Sci. 2020, 10(1), 18; https://doi.org/10.3390/app10010018
Received: 7 November 2019 / Revised: 15 December 2019 / Accepted: 16 December 2019 / Published: 18 December 2019
(This article belongs to the Special Issue Biomedical Optics and Engineering)
In this paper, microelectromechanical systems (MEMS) technology was used to fabricate a novel extrinsic fiber Fabry–Perot (EFFP) strain sensor; this fiber sensor is applied to measure load with higher precision for a small structure. The sensor cavity consists of two Fabry–Perot (FP) cavity mirrors that are processed by surface micromachining and then fused and spliced together by the silicon–glass anode bonding process. The initial cavity length can be strictly controlled, and the excellent parallelism of the two faces of the cavity results in a high interference fineness. Then, the anti-reflection coating process is applied to the sensor to improve the clarity of the interference signal with the cavity, with its wavelength working within the range of the C + L band. Next, the sensor placement is determined by the finite element software Nastran. Experimental results indicate that the sensor exhibits a good linear response (99.77%) to load changes and a high repeatability. Considering the strain transfer coefficient, the sensitivity for the tested structure load is as high as 35.6 pm/N. Due to the miniaturization, repeatability, and easy-to-batch production, the proposed sensor can be used as a reliable and practical force sensor. View Full-Text
Keywords: microelectromechanical systems; extrinsic Fabry-Perot interferometer; strain sensor; load measurement; repeatability microelectromechanical systems; extrinsic Fabry-Perot interferometer; strain sensor; load measurement; repeatability
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MDPI and ACS Style

Bai, Y.; Zeng, J.; Huang, J.; Zhong, S.; Cheng, Z.; Liang, D. Measurement of Structural Loads Using a Novel MEMS Extrinsic Fabry–Perot Strain Sensor. Appl. Sci. 2020, 10, 18. https://doi.org/10.3390/app10010018

AMA Style

Bai Y, Zeng J, Huang J, Zhong S, Cheng Z, Liang D. Measurement of Structural Loads Using a Novel MEMS Extrinsic Fabry–Perot Strain Sensor. Applied Sciences. 2020; 10(1):18. https://doi.org/10.3390/app10010018

Chicago/Turabian Style

Bai, Yufang; Zeng, Jie; Huang, Jiwei; Zhong, Shaolong; Cheng, Zhuming; Liang, Dakai. 2020. "Measurement of Structural Loads Using a Novel MEMS Extrinsic Fabry–Perot Strain Sensor" Appl. Sci. 10, no. 1: 18. https://doi.org/10.3390/app10010018

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