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Article

Longitudinal Composite-Mode Linear Ultrasonic Motor for Motion Servo System of Probe Station

1
College of Mechanical Engineering and Automation, Huaqiao University, Xiamen 361021, China
2
College of Aerospace Engineering, Nanjing University of Aeronautics and Astronautics, Nanjing 210016, China
3
Institute of Manufacturing Engineering, Huaqiao University, Xiamen 361021, China
*
Author to whom correspondence should be addressed.
Actuators 2020, 9(4), 111; https://doi.org/10.3390/act9040111
Received: 23 September 2020 / Revised: 2 November 2020 / Accepted: 2 November 2020 / Published: 5 November 2020
(This article belongs to the Section Miniaturized and Micro Actuators)
In order to build a motion system with high resolution, fast response, and long travel range in a probe station, a linear ultrasonic motor was investigated as an alternative to the electromagnetic counterpart in a servo system. This work focused on a longitudinal composite-mode linear ultrasonic motor for the motion servo system in a probe station. The motor was designed based on the required specifications. A finite element model was built to analyze the dynamic response of the stator. The influence of the structural parameters on the dynamic performances, i.e., sensitivity parameters, was calculated to analyze the stability of the structure. Based on these analytical works, a prototype of the stator was developed and mode testing was conducted. The experimental results showed that the proposed design was able to achieve respectable performance: Despite the dual-mode design, the frequency difference between the two working modes was minimized to 608 Hz; and the prototype could operate stably under 55.4 kHz, providing a 0.5 N load with 980 mm/s speed. View Full-Text
Keywords: probe station; linear ultrasonic motor (LUSM); longitudinal mode; FE simulation probe station; linear ultrasonic motor (LUSM); longitudinal mode; FE simulation
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MDPI and ACS Style

Wang, Y.; Chen, Z.; Shi, Y.; Cui, C.; Cheng, F. Longitudinal Composite-Mode Linear Ultrasonic Motor for Motion Servo System of Probe Station. Actuators 2020, 9, 111. https://doi.org/10.3390/act9040111

AMA Style

Wang Y, Chen Z, Shi Y, Cui C, Cheng F. Longitudinal Composite-Mode Linear Ultrasonic Motor for Motion Servo System of Probe Station. Actuators. 2020; 9(4):111. https://doi.org/10.3390/act9040111

Chicago/Turabian Style

Wang, Yin, Ziyan Chen, Yunlai Shi, Changcai Cui, and Fang Cheng. 2020. "Longitudinal Composite-Mode Linear Ultrasonic Motor for Motion Servo System of Probe Station" Actuators 9, no. 4: 111. https://doi.org/10.3390/act9040111

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