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Journal: Actuators, 2020
Volume: 9
Number: 111
Article:
Longitudinal Composite-Mode Linear Ultrasonic Motor for Motion Servo System of Probe Station
Authors:
by
Yin Wang, Ziyan Chen, Yunlai Shi, Changcai Cui and Fang Cheng
Link:
https://www.mdpi.com/2076-0825/9/4/111
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