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Journal: Actuators, 2023
Volume: 12
Number: 83
Article:
Dynamic Response Analysis of an Immersed Electrothermally Actuated MEMS Mirror
Authors:
by
Tailong Liu, Teng Pan, Shuijie Qin, Hui Zhao and Huikai Xie
Link:
https://www.mdpi.com/2076-0825/12/2/83
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