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Journal: Metals, 2024
Volume: 14
Number: 875
875
Article: Simulation Study of Crystalline Al₂O₃ Thin Films Prepared at Low Temperatures: Effect of Deposition Temperature and Biasing Voltage
Authors: by Wei Jiang, Jianhang Ju, Yuanliang Sun, Ling Weng, Zhiyuan Wang, Xiaofeng Wang, Jinna Liu and Enhao Wang
Link: https://www.mdpi.com/2075-4701/14/8/875

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