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Journal: Metals, 2021
Volume: 11
Number: 1604
Article:
Effect of Oxygen Flow Rate on Properties of Aluminum-Doped Indium-Saving Indium Tin Oxide (ITO) Thin Films Sputtered on Preheated Glass Substrates
Authors:
by
Svitlana Petrovska, Ruslan Sergiienko, Bogdan Ilkiv, Takashi Nakamura and Makoto Ohtsuka
Link:
https://www.mdpi.com/2075-4701/11/10/1604
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