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Open AccessArticle

Surface Topography Measurement of Mirror-Finished Surfaces Using Fringe-Patterned Illumination

Advanced Remanufacturing and Technology Centre (Agency for Science, Technology and Research), Singapore 637143, Singapore
JM Vistec System Pte Ltd., Singapore 415938, Singapore
Department of Mechanical Engineering, Katholieke Universiteit Leuven, 3001 Leuven, Belgium
Author to whom correspondence should be addressed.
Metals 2020, 10(1), 69;
Received: 27 November 2019 / Revised: 18 December 2019 / Accepted: 19 December 2019 / Published: 1 January 2020
(This article belongs to the Special Issue Advanced Surface Enhancement)
Mirror-finished surface products have a wide range of applications in different engineering industries, such as power generation, aerospace, semiconductors and optics. The surface topography of mirror-finished products is typically measured in a metrology laboratory, which is typically time consuming and cannot be integrated into the manufacturing process. To allow for in-situ product quality assurance and automatic tool change for manufacturing processes, a more accurate and responsive surface-measurement method is needed. For highly polished surfaces, a sub-micron surface fluctuation makes it possible to use light-scattering effects and image processing for surface texture analysis. A non-contact surface inspection system using a fringe-patterned illumination method is proposed in this paper. A predesigned pattern was projected onto the target surface, and its reflected image was captured by a camera. It was found that the surface parameters Sa and Sq, which are widely used to evaluate surface quality, are significantly correlated with luminous-intensity distribution. Another parameter, Str, which quantifies the uniformity of surface-texture directions due to polishing or grinding marks, was traditionally quantified after a complete-surface topographic measurement. In this research, a new approach is proposed to determine surface isotropy through a luminance-intensity distribution analysis. By rotating the test coupon, the variation of specular reflection showed correlation with the significance of surface-texture direction. The experimental results demonstrate that mirror-finished surfaces with a large deviation in luminance intensity across the pattern possess low Str values, which indicates low uniformity in surface texture. View Full-Text
Keywords: in-situ inspection; luminance contrast; fringe-patterned illumination; surface topography in-situ inspection; luminance contrast; fringe-patterned illumination; surface topography
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MDPI and ACS Style

Fu, S.; Cheng, F.; Tjahjowidodo, T. Surface Topography Measurement of Mirror-Finished Surfaces Using Fringe-Patterned Illumination. Metals 2020, 10, 69.

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