Mechanical and Tribological Properties of (AlCrNbSiTiMo)N High-Entropy Alloy Films Prepared Using Single Multiple-Element Powder Hot-Pressed Sintered Target and Their Practical Application in Nickel-Based Alloy Milling

(AlCrNbSiTiMo)N high-entropy alloy films with different nitrogen contents were deposited on tungsten carbide substrates using a radio-frequency magnetron sputtering system. Two different types of targets were used in the sputtering process: a hot-pressing sintered AlCrNbSiTi target fabricated using a single powder containing multiple elements and a vacuum arc melting Mo target. The deposited films were denoted as R_N0, R_N33, R_N43, R_N50, and R_N56, where R_N indicates the nitrogen flow ratio relative to the total nitrogen and argon flow rate (R_N = (N₂/(N₂ + Ar)) × 100%). The as-sputtered films were vacuum annealed, with the resulting films denoted as HR_N0, HR_N33, HR_N43, HR_N50, and HR_N56, respectively. The effects of the nitrogen content on the composition, microstructure, mechanical properties, and tribological properties of the films, in both as-sputtered and annealed states, underwent thorough analysis. The R_N0 and R_N33 films displayed non-crystalline structures. However, with an increase in nitrogen content, the R_N43, R_N50, and R_N56 films transitioned to FCC structures. Among the as-deposited films, the R_N43 film exhibited the best mechanical and tribological properties. All of the annealed films, except for the HR_N0 film, displayed an FCC structure. In addition, they all formed an MoO₃ solid lubricating phase, which reduced the coefficient of friction and improved the anti-wear performance. The heat treatment HR_N43 film displayed the supreme hardness, H/E ratio, and adhesion strength. It also demonstrated excellent thermal stability and the best wear resistance. As a result, in milling tests on Inconel 718, the R_N43-coated tool demonstrated a significantly lower flank wear and notch wear, indicating an improved machining performance and extended tool life. Thus, the application of the R_N43 film in aerospace manufacturing can effectively reduce the tool replacement cost.