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Journal: Polymers, 2024
Volume: 16
Number: 3593

Article: The Stability Evaluation of Ceria Slurry Using Polymer Dispersants with Varying Contents for Chemical Mechanical Polishing Process
Authors: by Sohee Hwang, Jihee Park and Woonjung Kim
Link: https://www.mdpi.com/2073-4360/16/24/3593

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