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Journal: Polymers, 2024
Volume: 16
Number: 3593
Article:
The Stability Evaluation of Ceria Slurry Using Polymer Dispersants with Varying Contents for Chemical Mechanical Polishing Process
Authors:
by
Sohee Hwang, Jihee Park and Woonjung Kim
Link:
https://www.mdpi.com/2073-4360/16/24/3593
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