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Growth of Catalyst-Free Hexagonal Pyramid-Like InN Nanocolumns on Nitrided Si(111) Substrates via Radio-Frequency Metal–Organic Molecular Beam Epitaxy

1
Taiwan Instrument Research Institute, National Applied Research Laboratories, 20. R&D Rd. VI, Hsinchu Science Park, Hsinchu 30076, Taiwan
2
Taiwan Semiconductor Research Institute, National Applied Research Laboratories, 26, Prosperity Road I, Hsinchu Science Park, Hsinchu 30078, Taiwan
3
Electrical Engineering Program C, Yuan-Ze University, 135 Yuan-Tung Road, Chung-Li 32003, Taiwan
4
Department of Electronic Engineering, Chang Gung University, 259 Wen-Hwa 1st Road, Kwei-Shan, Taoyuan 33302, Taiwan
5
Department of Urology, Chang Gung Memorial Hospital, Linkou, No.5, Fuxing Street, Kwei-Shan, Taoyuan 333, Taiwan
*
Authors to whom correspondence should be addressed.
Crystals 2019, 9(6), 291; https://doi.org/10.3390/cryst9060291
Received: 1 May 2019 / Revised: 30 May 2019 / Accepted: 3 June 2019 / Published: 5 June 2019
(This article belongs to the Special Issue MOVPE Growth of Crystalline Film)
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Abstract

Hexagonal pyramid-like InN nanocolumns were grown on Si(111) substrates via radio-frequency (RF) metal–organic molecular beam epitaxy (MOMBE) together with a substrate nitridation process. The metal–organic precursor served as a group-III source for the growth of InN nanocolumns. The nitridation of Si(111) under flowing N2 RF plasma and the MOMBE growth of InN nanocolumns on the nitrided Si(111) substrates were investigated along with the effects of growth temperature on the structural, optical, and chemical properties of the InN nanocolumns. Based on X-ray diffraction analysis, highly <0001>-oriented, hexagonal InN nanocolumns were grown on the nitride Si(111) substrates. To evaluate the alignment of arrays, the deviation angles of the InN nanocolumns were measured using scanning electron microscopy. Transmission electron microscopy analysis indicated that the InN nanocolumns were single-phase wurtzite crystals having preferred orientations along the c-axis. Raman spectroscopy confirmed the hexagonal structures of the deposited InN nanocolumns. View Full-Text
Keywords: InN nanocolumns; nitridation; nitrided Si(111) InN nanocolumns; nitridation; nitrided Si(111)
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Chen, W.-C.; Yu, T.-Y.; Lai, F.-I.; Chen, H.-P.; Lin, Y.-W.; Kuo, S.-Y. Growth of Catalyst-Free Hexagonal Pyramid-Like InN Nanocolumns on Nitrided Si(111) Substrates via Radio-Frequency Metal–Organic Molecular Beam Epitaxy. Crystals 2019, 9, 291.

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