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Journal: Crystals, 2022
Volume: 12
Number: 1129

Article: Study on Deposition Conditions in Coupled Polysilicon CVD Furnaces by Simulations
Authors: by Shengtao Zhang, Hao Fu, Guofeng Fan, Tie Li, Jindou Han and Lili Zhao
Link: https://www.mdpi.com/2073-4352/12/8/1129

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