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Journal: Crystals, 2022
Volume: 12
Number: 1115

Article: Pyroelectric and Ferroelectric Properties of Hafnium Oxide Doped with Si via Plasma Enhanced ALD
Authors: by Markus Neuber, Maximilian Walter Lederer, Konstantin Mertens, Thomas Kämpfe, Malte Czernohorsky and Konrad Seidel
Link: https://www.mdpi.com/2073-4352/12/8/1115

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