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Journal: Crystals, 2020
Volume: 10
Number: 520
Article:
Investigation of the Blistering and Exfoliation Mechanism of GaAs Wafers and SiO2/Si3N4/GaAs Wafers by He+ and H+ Implantation
Authors:
by
Rui Huang, Tian Lan, Chong Li, Jing Li and Zhiyong Wang
Link:
https://www.mdpi.com/2073-4352/10/6/520
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