Article Versions Notes

Wang C, Li L, Jing W, Zhang Y, Wang S, Lin Q, Xian D, Mao Q, Zhang Y, Duan D, et al. A Study on the Sub-5 nm Nano-Step Height Reference Materials Fabricated by Atomic Layer Deposition Combined with Wet Etching. Micromachines. 2022; 13(9):1454. https://doi.org/10.3390/mi13091454

Wang, Chenying, Lei Li, Weixuan Jing, Yaxin Zhang, Song Wang, Qijing Lin, Dan Xian, Qi Mao, Yijun Zhang, Duanzhi Duan, and et al. 2022. "A Study on the Sub-5 nm Nano-Step Height Reference Materials Fabricated by Atomic Layer Deposition Combined with Wet Etching" Micromachines 13, no. 9: 1454. https://doi.org/10.3390/mi13091454

Wang, C., Li, L., Jing, W., Zhang, Y., Wang, S., Lin, Q., Xian, D., Mao, Q., Zhang, Y., Duan, D., Liu, M., & Jiang, Z. (2022). A Study on the Sub-5 nm Nano-Step Height Reference Materials Fabricated by Atomic Layer Deposition Combined with Wet Etching. Micromachines, 13(9), 1454. https://doi.org/10.3390/mi13091454