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Gimbal-Less Two-Axis Electromagnetic Microscanner with Twist Mechanism

School of Mechanical Engineering, Gwangju Institute of Science and Technology (GIST), Gwangju 61005, Korea
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Micromachines 2018, 9(5), 219; https://doi.org/10.3390/mi9050219
Received: 2 April 2018 / Revised: 24 April 2018 / Accepted: 3 May 2018 / Published: 6 May 2018
(This article belongs to the Special Issue Microsystems for Power, Energy, and Actuation)
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Abstract

We present an electromagnetically driven microscanner based on a gimbal-less twist mechanism. In contrast to conventional microscanners using a gimbal-less leverage mechanism, our device utilizes a gimbal-less twist mechanism to increase the scan angle in optical applications requiring a large scanning mirror. The proposed gimbal-less scanner with twist mechanism increases the scan angle by 1.55 and 1.97 times for the slow and fast axes, respectively, under the same force; 3.64 and 1.97 times for the slow and fast axes, respectively, under the same maximum stress, compared to the gimbal-less leverage mechanism. The scanner with a 3-mm-diameter mirror and a current path composed of a single-turn coil was fabricated, and it showed the maximum scan angle of 5° (quasi-static) and 22° (resonant) for the slow and fast axes, respectively. The experimentally estimated crosstalk was as small as 0.47% and 0.97% for the fast and slow axes affected by the other axes, respectively, which was determined using a newly employed methodology based on fast Fourier transform. View Full-Text
Keywords: gimbal-less; twist mechanism; electromagnetic; crosstalk; fast Fourier transform (FFT) gimbal-less; twist mechanism; electromagnetic; crosstalk; fast Fourier transform (FFT)
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Park, Y.; Moon, S.; Lee, J.; Kim, K.; Lee, S.-J.; Lee, J.-H. Gimbal-Less Two-Axis Electromagnetic Microscanner with Twist Mechanism. Micromachines 2018, 9, 219.

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