Electric Power Self-Supply Module for WSN Sensor Node Based on MEMS Vibration Energy Harvester
Abstract
:1. Introduction
2. Materials and Methods
2.1. The Theoretical Model of the Harvester
2.2. Design and Fabrication of the Harvester
- (1)
- The main purpose of the first step is to manufacture copper coils. First, 500 nm silicon dioxide is deposited on a 4-inch wafer as an insulation layer, and 50 nm Ti and 200 nm Cu are sputtered as a seed layer. Next, a 30 μm negative photoresist is deposited, and then, mask 1 is used (Figure 3a) to cause exposure and development. The actual thickness of the photoresist is measured as an average of 35.05 μm.
- (2)
- The result of the second step is beams and trays. Accordingly, 30 μm Cu is plated and 200 nm Cu are sputtered as a seed layer. Next, a 15 μm negative photoresist is deposited, and then, mask 2 (Figure 3b) is used to cause exposure and development. The actual thickness of photoresist is measured as an average of 24.98 μm.
- (3)
- Finally, 15 μm Cu is plated. Next, a 30 μm negative photoresist is deposited, and then, mask 3 (Figure 3c) is used to cause exposure and development. Then, a 30 μm CoNiMnP permanent magnet is electroplated. Finally, all photoresist and seed layers are etched. The actual thickness of photoresist is measured as an average of 33.60 μm. The average thickness of CoNiMnP is 18 μm.
2.3. Design of the Circuit Frame
3. Results
4. Discussion
5. Conclusions
Acknowledgments
Author Contributions
Conflicts of Interest
References
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Energy Storage | Energy Density (Wh/kg) | Power Density (W/kg) | Cycle Life |
---|---|---|---|
Super Capacitor | 0.2–20 | 7000–18,000 | >100,000 |
Lithium Ion Battery | 100–150 | 100–150 | <1000 |
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Zhang, W.; Dong, Y.; Tan, Y.; Zhang, M.; Qian, X.; Wang, X. Electric Power Self-Supply Module for WSN Sensor Node Based on MEMS Vibration Energy Harvester. Micromachines 2018, 9, 161. https://doi.org/10.3390/mi9040161
Zhang W, Dong Y, Tan Y, Zhang M, Qian X, Wang X. Electric Power Self-Supply Module for WSN Sensor Node Based on MEMS Vibration Energy Harvester. Micromachines. 2018; 9(4):161. https://doi.org/10.3390/mi9040161
Chicago/Turabian StyleZhang, Wenyang, Ying Dong, Yushan Tan, Min Zhang, Xiang Qian, and Xiaohao Wang. 2018. "Electric Power Self-Supply Module for WSN Sensor Node Based on MEMS Vibration Energy Harvester" Micromachines 9, no. 4: 161. https://doi.org/10.3390/mi9040161