Next Article in Journal
Wearable Pulse Wave Monitoring System Based on MEMS Sensors
Next Article in Special Issue
Acceleration Sensitivity in Bulk-Extensional Mode, Silicon-Based MEMS Oscillators
Previous Article in Journal
Light-Controlled Swarming and Assembly of Colloidal Particles
Previous Article in Special Issue
Micro-Electromechanical Acoustic Resonator Coated with Polyethyleneimine Nanofibers for the Detection of Formaldehyde Vapor
Article Menu
Issue 2 (February) cover image

Export Article

Open AccessArticle

Monostable Dynamic Analysis of Microbeam-Based Resonators via an Improved One Degree of Freedom Model

1
School of Transportation and Vehicle Engineering, Shandong University of Technology, Zibo 255049, China
2
Department of Mechanics, School of Mechanical Engineering, Tianjin University, Tianjin 300350, China
3
Tianjin Key Laboratory of High Speed Cutting and Precision Machining, Tianjin University of Technology and Education, Tianjin 300222, China
*
Author to whom correspondence should be addressed.
Micromachines 2018, 9(2), 89; https://doi.org/10.3390/mi9020089
Received: 17 December 2017 / Revised: 8 February 2018 / Accepted: 19 February 2018 / Published: 22 February 2018
(This article belongs to the Special Issue Micro-Resonators: The Quest for Superior Performance)
  |  
PDF [2056 KB, uploaded 22 February 2018]
  |  

Abstract

Monostable vibration can eliminate dynamic bifurcation and improve system stability, which is required in many microelectromechanical systems (MEMS) applications, such as microbeam-based and comb-driven resonators. This article aims to theoretically investigate the monostable vibration in size-effected MEMS via a low dimensional model. An improved single degree of freedom model to describe electrically actuated microbeam-based resonators is obtained by using modified couple stress theory and Nonlinear Galerkin method. Static displacement, pull-in voltage, resonant frequency and especially the monostable dynamic behaviors of the resonators are investigated in detail. Through perturbation analysis, an approximate average equation is derived by the application of the method of Multiple Scales. Theoretical expressions about parameter space and maximum amplitude of monostable vibration are then deduced. Results show that this improved model can describe the static behavior more accurately than that of single degree of freedom model via traditional Galerkin Method. This desired monostable large amplitude vibration is significantly affected by the ratio of the gap width to mircobeam thickness. The optimization design results show that reasonable decrease of this ratio can be beneficial to monostable vibration. All these analytical results are verified by numerical results via Differential Quadrature method, which show excellent agreement with each other. This analysis has the potential of improving dynamic performance in MEMS. View Full-Text
Keywords: MEMS; monostable vibration; Nonlinear Galerkin method; optimization MEMS; monostable vibration; Nonlinear Galerkin method; optimization
Figures

Figure 1

This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).
SciFeed
Printed Edition Available!
A printed edition of this Special Issue is available here.

Share & Cite This Article

MDPI and ACS Style

Li, L.; Zhang, Q.; Wang, W.; Han, J. Monostable Dynamic Analysis of Microbeam-Based Resonators via an Improved One Degree of Freedom Model. Micromachines 2018, 9, 89.

Show more citation formats Show less citations formats

Note that from the first issue of 2016, MDPI journals use article numbers instead of page numbers. See further details here.

Related Articles

Article Metrics

Article Access Statistics

1

Comments

[Return to top]
Micromachines EISSN 2072-666X Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert
Back to Top