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Micromachines 2018, 9(2), 62; https://doi.org/10.3390/mi9020062

Micro-Electromechanical Acoustic Resonator Coated with Polyethyleneimine Nanofibers for the Detection of Formaldehyde Vapor

1
State Key Laboratory of Mining Disaster Prevention and Control Co-founded by Shandong Province and the Ministry of Science and Technology, Shandong University of Science and Technology, Qingdao 266590, China
2
College of Electronics, Communications, and Physics, Shandong University of Science and Technology, Qingdao 266590, China
*
Author to whom correspondence should be addressed.
Received: 19 December 2017 / Revised: 22 January 2018 / Accepted: 26 January 2018 / Published: 1 February 2018
(This article belongs to the Special Issue Micro-Resonators: The Quest for Superior Performance)
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Abstract

We demonstrate a promising strategy to combine the micro-electromechanical film bulk acoustic resonator and the nanostructured sensitive fibers for the detection of low-concentration formaldehyde vapor. The polyethyleneimine nanofibers were directly deposited on the resonator surface by a simple electrospinning method. The film bulk acoustic resonator working at 4.4 GHz acted as a sensitive mass loading platform and the three-dimensional structure of nanofibers provided a large specific surface area for vapor adsorption and diffusion. The ultra-small mass change induced by the absorption of formaldehyde molecules onto the amine groups in polyethyleneimine was detected by measuring the frequency downshift of the film bulk acoustic resonator. The proposed sensor exhibits a fast, reversible and linear response towards formaldehyde vapor with an excellent selectivity. The gas sensitivity and the detection limit were 1.216 kHz/ppb and 37 ppb, respectively. The study offers a great potential for developing sensitive, fast-response and portable sensors for the detection of indoor air pollutions. View Full-Text
Keywords: film bulk acoustic resonator; formaldehyde; gas sensor; nanofibers film bulk acoustic resonator; formaldehyde; gas sensor; nanofibers
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).

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Chen, D.; Yang, L.; Yu, W.; Wu, M.; Wang, W.; Wang, H. Micro-Electromechanical Acoustic Resonator Coated with Polyethyleneimine Nanofibers for the Detection of Formaldehyde Vapor. Micromachines 2018, 9, 62.

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