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Micromachines 2018, 9(2), 64;

Fundamental Study for a Graphite-Based Microelectromechanical System

Faculty of Engineering, Tokyo Polytechnic University, Atsugi 243-0297, Japan
Material Solutions Research Institute, KANEKA Corporation, Torikai-Nishi 5-1-1, Settsu, Osaka 566-0072, Japan
Author to whom correspondence should be addressed.
Received: 29 December 2017 / Revised: 29 January 2018 / Accepted: 31 January 2018 / Published: 2 February 2018
(This article belongs to the Special Issue Carbon Based Materials for MEMS/NEMS)
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We aimed to develop a process for constructing a carbon-based microelectromechanical system (MEMS). First, we prepared a highly oriented pyrolytic graphite (HOPG) crystal microsheet by exfoliation. We fabricated cantilevers and a double-clamped beam by controlling the thickness of the HOPG microsheet using a MEMS process. Second, we used a graphite sheet with contour line adhesion by metal sputter deposition. Third, we used a highly accurate graphite sheet with face adhesion and laser cutting. The first resonance frequencies were evaluated. We confirmed improvement in Q values to 1/10 level of a quarts vibrator, high performance, and a simple structure. View Full-Text
Keywords: carbon-MEMS; cantilever; doubly clamped beam; resonance frequency; HOPG; graphite sheet carbon-MEMS; cantilever; doubly clamped beam; resonance frequency; HOPG; graphite sheet

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Sone, J.; Murakami, M.; Tatami, A. Fundamental Study for a Graphite-Based Microelectromechanical System. Micromachines 2018, 9, 64.

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