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Journal: Micromachines, 2018
Volume: 9
Number: 53

Article: Statistical Investigation of the Mechanical and Geometrical Properties of Polysilicon Films through On-Chip Tests
Authors: by Ramin Mirzazadeh, Aldo Ghisi and Stefano Mariani
Link: https://www.mdpi.com/2072-666X/9/2/53

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