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Applications of Photonic Crystal Nanobeam Cavities for Sensing

1,2,3, 1, 2,3 and 1,3,*
1
Department of Mechanical Engineering, National University of Singapore, Singapore 117579, Singapore
2
Department of Electrical and Computer Engineering, National University of Singapore, Singapore 117583, Singapore
3
Center for Intelligent Sensors and MEMS (CISM), National University of Singapore, Singapore 117608, Singapore
*
Author to whom correspondence should be addressed.
Micromachines 2018, 9(11), 541; https://doi.org/10.3390/mi9110541
Received: 4 September 2018 / Revised: 9 October 2018 / Accepted: 19 October 2018 / Published: 23 October 2018
(This article belongs to the Special Issue MEMS/NEMS Sensors: Fabrication and Application)
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Abstract

In recent years, there has been growing interest in optical sensors based on microcavities due to their advantages of size reduction and enhanced sensing capability. In this paper, we aim to give a comprehensive review of the field of photonic crystal nanobeam cavity-based sensors. The sensing principles and development of applications, such as refractive index sensing, nanoparticle sensing, optomechanical sensing, and temperature sensing, are summarized and highlighted. From the studies reported, it is demonstrated that photonic crystal nanobeam cavities, which provide excellent light confinement capability, ultra-small size, flexible on-chip design, and easy integration, offer promising platforms for a range of sensing applications. View Full-Text
Keywords: photonic crystal cavity; photonic crystal nanobeam cavity; optical sensor; refractive index sensor; nanoparticle sensor; optomechanical sensor; temperature sensor photonic crystal cavity; photonic crystal nanobeam cavity; optical sensor; refractive index sensor; nanoparticle sensor; optomechanical sensor; temperature sensor
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Qiao, Q.; Xia, J.; Lee, C.; Zhou, G. Applications of Photonic Crystal Nanobeam Cavities for Sensing. Micromachines 2018, 9, 541.

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