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Micromachines 2018, 9(10), 514; https://doi.org/10.3390/mi9100514

Thermal Performance of Micro Hotplates with Novel Shapes Based on Single-Layer SiO2 Suspended Film

National Key Laboratory of Science and Technology on Micro/Nano Fabrication, School of Electronic Information and Electrical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China
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Received: 15 September 2018 / Revised: 30 September 2018 / Accepted: 1 October 2018 / Published: 11 October 2018
(This article belongs to the Special Issue MEMS/NEMS Sensors: Fabrication and Application)
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Abstract

In this paper, two kinds of suspended micro hotplate with novel shapes of multibeam structure and reticular structure are designed. These designs have a reliable mechanical strength, so they can be designed and fabricated on single-layer SiO2 suspended film through a simplified process. Single-layer suspended film helps to reduce power consumption. Based on the new film shapes, different resistance heaters with various widths and thicknesses are designed. Then, the temperature uniformity and power consumption of different micro hotplates are compared to study the effect of these variables and obtain the one with the optimal thermal performance. We report the simulations of temperature uniformity and give the corresponding infrared images in measurement. The experimental temperature differences are larger than those of the simulation. Experimental results show that the lowest power consumption and the minimum temperature difference are 43 mW and 50 °C, respectively, when the highest temperature on the suspended platform (240 × 240 μm2) is 450 °C. Compared to the traditional four-beam micro hotplate, temperature non-uniformity is reduced by about 30–50%. View Full-Text
Keywords: suspended micro hotplate; single-layer SiO2; temperature uniformity; power consumption; infrared image suspended micro hotplate; single-layer SiO2; temperature uniformity; power consumption; infrared image
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).
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Liu, Q.; Ding, G.; Wang, Y.; Yao, J. Thermal Performance of Micro Hotplates with Novel Shapes Based on Single-Layer SiO2 Suspended Film. Micromachines 2018, 9, 514.

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