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Micromachines 2018, 9(10), 511; https://doi.org/10.3390/mi9100511

Automatic Frequency Tuning Technology for Dual-Mass MEMS Gyroscope Based on a Quadrature Modulation Signal

1,2
,
1,2
,
1,2
and
1,2,*
1
School of Instrument Science and Engineering, Southeast University, Nanjing 210096, China
2
Key Laboratory of Micro-Inertial Instruments and Advanced Navigation Technology, Ministry of Education, Nanjing 210096, China
*
Author to whom correspondence should be addressed.
Received: 17 September 2018 / Revised: 5 October 2018 / Accepted: 8 October 2018 / Published: 10 October 2018
(This article belongs to the Special Issue MEMS/NEMS Sensors: Fabrication and Application)
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Abstract

In order to eliminate the frequency mismatch of MEMS (Microelectromechanical Systems) gyroscopes, this paper proposes a frequency tuning technology based on a quadrature modulation signal. A sinusoidal signal having a frequency greater the gyroscope operating bandwidth is applied to the quadrature stiffness correction combs, and the modulation signal containing the frequency split information is then excited at the gyroscope output. The effects of quadrature correction combs and frequency tuning combs on the resonant frequency of gyroscope are analyzed. The tuning principle based on low frequency input excitation is analyzed, and the tuning system adopting this principle is designed and simulated. The experiments are arranged to verify the theoretical analysis. The wide temperature range test (-20 C –60 C ) demonstrates the reliability of the tuning system with a maximum mismatch frequency of less than 0.3 Hz. The scale factor test and static test were carried out at three temperature conditions (−20 C, room temperature, 60 C), and the scale factor, zero-bias instability, and angle random walk are improved. Moreover, the closed-loop detection method is adopted, which improves the scale factor nonlinearity and bandwidth under the premise of maintaining the same static performances compared with the open-loop detection by tuning. View Full-Text
Keywords: dual-mass MEMS gyroscope; frequency tuning; frequency split; quadrature modulation signal; frequency mismatch dual-mass MEMS gyroscope; frequency tuning; frequency split; quadrature modulation signal; frequency mismatch
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Jia, J.; Ding, X.; Gao, Y.; Li, H. Automatic Frequency Tuning Technology for Dual-Mass MEMS Gyroscope Based on a Quadrature Modulation Signal. Micromachines 2018, 9, 511.

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