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Journal: Micromachines, 2018
Volume: 9
Number: 514
Article:
Thermal Performance of Micro Hotplates with Novel Shapes Based on Single-Layer SiO2 Suspended Film
Authors:
by
Qi Liu, Guifu Ding, Yipin Wang and Jinyuan Yao
Link:
https://www.mdpi.com/2072-666X/9/10/514
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