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Journal: Micromachines, 2017
Volume: 8
Number: 240

Article: Scanning Micro-Mirror with an Electrostatic Spring for Compensation of Hard-Spring Nonlinearity
Authors: by Takashi Izawa, Takashi Sasaki and Kazuhiro Hane
Link: https://www.mdpi.com/2072-666X/8/8/240

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