Operation of a MOEMS Deformable Mirror in Cryo: Challenges and Results
Abstract
:1. Introduction
2. Deformable Mirrors
2.1. BMC Deformable Mirror
2.2. Iris AO Deformable Mirror
3. Cryogenic Interferometric Test Set-Up
3.1. Interferometric Bench
3.2. Cryogenic Experiment
3.3. PTT111 Mounting
4. PTT111 Surface Characterization
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- a pure piston (150 nm) on the central M1 segment,
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- a global astigmatism on the mirror, using the global Zernike coefficient set at 0.125,
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- a series of three identical tilts on all segments in X direction, with 0.25 mrad, 1.5 mrad, and 4.9 mrad respectively.
4.1. Best Flat at Ambient
4.2. Best Flat at 160 K, First Run
4.3. Best Flat at Ambient (Back 1)
4.4. Best Flat at 160 K, Second Run
4.5. Best Flat at Ambient (Back 2)
4.6. Analysis at Segment Level
5. Conclusions
Author Contributions
Conflicts of Interest
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Zamkotsian, F.; Lanzoni, P.; Barette, R.; Helmbrecht, M.; Marchis, F.; Teichman, A. Operation of a MOEMS Deformable Mirror in Cryo: Challenges and Results. Micromachines 2017, 8, 233. https://doi.org/10.3390/mi8080233
Zamkotsian F, Lanzoni P, Barette R, Helmbrecht M, Marchis F, Teichman A. Operation of a MOEMS Deformable Mirror in Cryo: Challenges and Results. Micromachines. 2017; 8(8):233. https://doi.org/10.3390/mi8080233
Chicago/Turabian StyleZamkotsian, Frederic, Patrick Lanzoni, Rudy Barette, Michael Helmbrecht, Franck Marchis, and Alex Teichman. 2017. "Operation of a MOEMS Deformable Mirror in Cryo: Challenges and Results" Micromachines 8, no. 8: 233. https://doi.org/10.3390/mi8080233