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Micromachines 2017, 8(6), 185;

Lithium Niobate Micromachining for the Fabrication of Microfluidic Droplet Generators

Physics and Astronomy Department, University of Padova, Via Marzolo 8, 35131 Padova, Italy
Nonlinear Photonics Group, Institute of Applied Physics, University of Münster Corrensstrasse 2/4, 48149 Münster, Germany
FEMTO-ST Institute, UMR 6174, University of Bourgogne Franche-Comté, 15B Avenue des Montboucons, 25000 Besançon, France
CEASC at University of Padova, Via Jappelli 1, 35131 Padova, Italy
These authors contributed equally to this work.
Author to whom correspondence should be addressed.
Academic Editors: Roberto Osellame and Rebeca Martinez
Received: 9 March 2017 / Revised: 22 May 2017 / Accepted: 31 May 2017 / Published: 9 June 2017
(This article belongs to the Special Issue Ultrafast Laser Fabrication for Lab-on-a-Chip)
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In this paper, we present the first microfluidic junctions for droplet generation directly engraved on lithium niobate crystals by micromachining techniques, preparatory to a fully integrated opto-microfluidics lab-on-chip system. In particular, laser ablation technique and the mechanical micromachining technique are exploited to realise microfluidic channels in T- and cross junction configurations. The quality of both lateral and bottom surfaces of the channels are therefore compared together with a detailed study of their roughness measured by means of atomic force microscopy in order to evaluate the final performance achievable in an optofluidic device. Finally, the microfluidics performances of these water-in-oil droplets generators are investigated depending on these micromachining techniques, with particular focus on a wide range of droplet generation rates. View Full-Text
Keywords: microfluidics; droplets; lithium niobate; micromachining; laser ablation; femtosecond; dicing microfluidics; droplets; lithium niobate; micromachining; laser ablation; femtosecond; dicing

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Bettella, G.; Pozza, G.; Kroesen, S.; Zamboni, R.; Baggio, E.; Montevecchi, C.; Zaltron, A.; Gauthier-Manuel, L.; Mistura, G.; Furlan, C.; Chauvet, M.; Denz, C.; Sada, C. Lithium Niobate Micromachining for the Fabrication of Microfluidic Droplet Generators. Micromachines 2017, 8, 185.

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