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Journal: Micromachines, 2017
Volume: 8
Number: 173
Article:
Separated Type Atmospheric Pressure Plasma Microjets Array for Maskless Microscale Etching
Authors:
by
Yichuan Dai, Man Zhang, Qiang Li, Li Wen, Hai Wang and Jiaru Chu
Link:
https://www.mdpi.com/2072-666X/8/6/173
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