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Journal: Micromachines, 2017
Volume: 8
Number: 173

Article: Separated Type Atmospheric Pressure Plasma Microjets Array for Maskless Microscale Etching
Authors: by Yichuan Dai, Man Zhang, Qiang Li, Li Wen, Hai Wang and Jiaru Chu
Link: https://www.mdpi.com/2072-666X/8/6/173

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