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Journal: Micromachines, 2017
Volume: 8
Number: 348
Article:
Effects of the Manufacturing Process on the Reliability of the Multilayer Structure in MetalMUMPs Actuators: Residual Stresses and Variation of Design Parameters
Authors:
by
Jianbin Guo, Jinling Wang, Shengkui Zeng, Vadim V. Silberschmidt and Yongguang Shen
Link:
https://www.mdpi.com/2072-666X/8/12/348
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