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Micromachines 2017, 8(12), 348; https://doi.org/10.3390/mi8120348

Effects of the Manufacturing Process on the Reliability of the Multilayer Structure in MetalMUMPs Actuators: Residual Stresses and Variation of Design Parameters

1
School of Reliability and Systems Engineering, Beihang University, Beijing 100191, China
2
School of Electrical and Electionic Engieering, Zibo Vacational Insititute, Zibo 255314, China
3
Wolfson Mechanical and Manufacturing Engineering, Loughborough University, Leicestershire LE11 3TU, UK
*
Author to whom correspondence should be addressed.
Received: 3 November 2017 / Revised: 27 November 2017 / Accepted: 28 November 2017 / Published: 29 November 2017
(This article belongs to the Special Issue Microsystems for Power, Energy, and Actuation)
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Abstract

Potential problems induced by the multilayered manufacturing process pose a serious threat to the long-term reliability of MEMSCAP® actuators under in-service thermal cycling. Damage would initiate and propagate in different material layers because of a large mismatch of their thermal expansions. In this research, residual stresses and variations of design parameters induced by metal multi-user micro electromechanical system processes (MetalMUMPs) were examined to evaluate their effects on the thermal fatigue lifetime of the multilayer structure and, thus, to improve MEMSCAP® design. Since testing in such micro internal structure is difficult to conduct and traditional testing schemes are destructive, a numerical subdomain method based on a finite element technique was employed. Thermomechanical deformation from metal to insulator layers under in-service temperature cycling (obtained from the multiphysics model of the entire actuator, which was validated by experimental and specified analytical solutions) was accurately estimated to define failures with a significant efficiency and feasibility. Simulation results showed that critical failure modes included interface delamination, plastic deformation, micro cracking, and thermal fatigue, similarly to what was concluded in the MEMSCAP® technical report. View Full-Text
Keywords: micro electromechanical systems (MEMS); residual stresses; subdomain method; manufacturing process; multilayer structure micro electromechanical systems (MEMS); residual stresses; subdomain method; manufacturing process; multilayer structure
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Guo, J.; Wang, J.; Zeng, S.; Silberschmidt, V.V.; Shen, Y. Effects of the Manufacturing Process on the Reliability of the Multilayer Structure in MetalMUMPs Actuators: Residual Stresses and Variation of Design Parameters. Micromachines 2017, 8, 348.

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