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Design and Manufacturing of a Passive Pressure Sensor Based on LC Resonance

Department of Mechanical and Electrical Engineering, Xiamen University, Xiamen 361005, China
Authors to whom correspondence should be addressed.
Academic Editor: Hongrui Jiang
Micromachines 2016, 7(5), 87;
Received: 29 January 2016 / Revised: 27 April 2016 / Accepted: 5 May 2016 / Published: 10 May 2016
The LC resonator-based passive pressure sensor attracts much attention because it does not need a power source or lead wires between the sensing element and the readout system. This paper presents the design and manufacturing of a passive pressure sensor that contains a variable capacitor and a copper-electroplated planar inductor. The sensor is fabricated using silicon bulk micro-machining, electroplating, and anodic bonding technology. The finite element method is used to model the deflection of the silicon diaphragm and extract the capacitance change corresponding to the applied pressure. Within the measurement range from 5 to 100 kPa, the sensitivity of the sensor is 0.052 MHz/kPa, the linearity is 2.79%, and the hysteresis error is 0.2%. Compared with the sensitivity at 27 °C, the drop of output performance is 3.53% at 140 °C. View Full-Text
Keywords: pressure sensor; LC resonance; wireless pressure sensor; LC resonance; wireless
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MDPI and ACS Style

Zheng, C.; Li, W.; Li, A.-L.; Zhan, Z.; Wang, L.-Y.; Sun, D.-H. Design and Manufacturing of a Passive Pressure Sensor Based on LC Resonance. Micromachines 2016, 7, 87.

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