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Journal: Micromachines, 2016
Volume: 7
Number: 40
Article:
Fabrication and Measurement of a Suspended Nanochannel Microbridge Resonator Monolithically Integrated with CMOS Readout Circuitry
Authors:
by
Gabriel Vidal-Álvarez, Eloi Marigó, Francesc Torres and Núria Barniol
Link:
https://www.mdpi.com/2072-666X/7/3/40
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