Electrothermal Actuators for SiO2 Photonic MEMS
Precision and Microsystems Engineering (PME), Delft University of Technology, Mekelweg 2, 2628 CD Delft, The Netherlands
Current address: Bright Society, High Tech Campus 68, 5656 AG Eindhoven, The Netherlands.
Author to whom correspondence should be addressed.
Academic Editor: Hiroshi Toshiyoshi
Received: 12 October 2016 / Revised: 28 October 2016 / Accepted: 2 November 2016 / Published: 7 November 2016
This paper describes the design, fabrication and characterization of electrothermal bimorph actuators consisting of polysilicon on top of thick (>10
) silicon dioxide beams. This material platform enables the integration of actuators with photonic waveguides, producing mechanically-flexible photonic waveguide structures that are positionable. These structures are explored as part of a novel concept for highly automated, sub-micrometer precision chip-to-chip alignment. In order to prevent residual stress-induced fracturing that is associated with the release of thick oxide structures from a silicon substrate, a special reinforcement method is applied to create suspended silicon dioxide beam structures. The characterization includes measurements of the post-release deformation (i.e., without actuation), as well as the deflection resulting from quasi-static and dynamic actuation. The post-release deformation reveals a curvature, resulting in the free ends of 800
long silicon dioxide beams with 5
-thick polysilicon to be situated approximately 80
above the chip surface. Bimorph actuators that are 800
in length produce an out-of-plane deflection of approximately 11
dissipated power, corresponding to an estimated 240
actuator temperature. The delivered actuation force of the 800
-long bimorph actuators having 5
-thick polysilicon is calculated to be approximately 750
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MDPI and ACS Style
Peters, T.-J.; Tichem, M. Electrothermal Actuators for SiO2 Photonic MEMS. Micromachines 2016, 7, 200.
Peters T-J, Tichem M. Electrothermal Actuators for SiO2 Photonic MEMS. Micromachines. 2016; 7(11):200.
Peters, Tjitte-Jelte; Tichem, Marcel. 2016. "Electrothermal Actuators for SiO2 Photonic MEMS." Micromachines 7, no. 11: 200.
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