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Journal: Micromachines, 2016
Volume: 7
Number: 193
Article:
A WSi–WSiN–Pt Metallization Scheme for Silicon Carbide-Based High Temperature Microsystems
Authors:
by
Ha-Duong Ngo, Biswajit Mukhopadhyay, Piotr Mackowiak, Kevin Kröhnert, Oswin Ehrmann and Klaus-Dieter Lang
Link:
https://www.mdpi.com/2072-666X/7/10/193
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