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Micromachines 2016, 7(1), 8;

Design and Analysis of MEMS Linear Phased Array

State Key Laboratory of Acoustics, Chinese Academy of Sciences, Beijing 100190, China
Author to whom correspondence should be addressed.
Academic Editors: Nathan Jackson, Marc Desmulliez and Nam-Trung Nguyen
Received: 21 October 2015 / Revised: 21 December 2015 / Accepted: 8 January 2016 / Published: 15 January 2016
(This article belongs to the Special Issue Piezoelectric MEMS)
Full-Text   |   PDF [4883 KB, uploaded 15 January 2016]   |  


A structure of micro-electro-mechanical system (MEMS) linear phased array based on “multi-cell” element is designed to increase radiation sound pressure of transducer working in bending vibration mode at high frequency. In order to more accurately predict the resonant frequency of an element, the theoretical analysis of the dynamic equation of a fixed rectangular composite plate and finite element method simulation are adopted. The effects of the parameters both in the lateral and elevation direction on the three-dimensional beam directivity characteristics are comprehensively analyzed. The key parameters in the analysis include the “cell” number of element, “cell” size, “inter-cell” spacing and the number of elements, element width. The simulation results show that optimizing the linear array parameters both in the lateral and elevation direction can greatly improve the three-dimensional beam focusing for MEMS linear phased array, which is obviously different from the traditional linear array. View Full-Text
Keywords: MEMS; “multi-cell” element; linear phased array; three-dimensional directivity MEMS; “multi-cell” element; linear phased array; three-dimensional directivity

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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).

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Fan, G.; Li, J.; Wang, C. Design and Analysis of MEMS Linear Phased Array. Micromachines 2016, 7, 8.

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