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Journal: Micromachines, 2015
Volume: 6
Number: 1236
Article:
Research on the Piezoelectric Properties of AlN Thin Films for MEMS Applications
Authors:
by
Meng Zhang, Jian Yang, Chaowei Si, Guowei Han, Yongmei Zhao and Jin Ning
Link:
https://www.mdpi.com/2072-666X/6/9/1236
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