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Multi Parameter Flow Meter for On-Line Measurement of Gas Mixture Composition

Bronkhorst High-Tech BV, Nijverheidsstraat 1A, 7261 AK Ruurlo, The Netherlands
MESA+ Institute for Nanotechnology, University of Twente, P.O. Box 217, 7500 AE Enschede, The Netherlands
Author to whom correspondence should be addressed.
This paper is an extended version of our paper published in the 2nd International Conference on Microfluidic Handling Systems, Freiburg, Germany, 8–10 October 2014.
Academic Editor: Nam-Trung Nguyen
Micromachines 2015, 6(4), 452-461;
Received: 2 March 2015 / Revised: 25 March 2015 / Accepted: 31 March 2015 / Published: 10 April 2015
PDF [2897 KB, uploaded 10 April 2015]


In this paper we describe the development of a system and model to analyze the composition of gas mixtures up to four components. The system consists of a Coriolis mass flow sensor, density, pressure and thermal flow sensor. With this system it is possible to measure the viscosity, density, heat capacity and flow rate of the medium. In a next step the composition can be analyzed if the constituents of the mixture are known. This makes the approach universally applicable to all gasses as long as the number of components does not exceed the number of measured properties and as long as the properties are measured with a sufficient accuracy. We present measurements with binary and ternary gas mixtures, on compositions that range over an order of magnitude in value for the physical properties. Two platforms for analyses are presented. The first platform consists of sensors realized with MEMS fabrication technology. This approach allows for a system with a high level of integration. With this system we demonstrate a proof of principle for the analyses of binary mixtures with an accuracy of 10%. In the second platform we utilize more mature steel sensor technology to demonstrate the potential of this approach. We show that with this technique, binary mixtures can be measured within 1% and ternary gas mixtures within 3%. View Full-Text
Keywords: multi parameter; gas mixtures; thermal flow sensor; Coriolis flow sensor; system model multi parameter; gas mixtures; thermal flow sensor; Coriolis flow sensor; system model

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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).

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Van der Wouden, E.; Groenesteijn, J.; Wiegerink, R.; Lötters, J. Multi Parameter Flow Meter for On-Line Measurement of Gas Mixture Composition. Micromachines 2015, 6, 452-461.

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