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Micromachines 2016, 7(1), 2;

Design and Performance of a Focus-Detection System for Use in Laser Micromachining

Department of Laser and Electron Beam Application, Korea Institute of Machinery & Materials (KIMM), Daejeon 34103, Korea
Department of Nano-Mechatronics, Korea University of Science and Technology (UST), Daejeon 34113, Korea
Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology (KAIST), Daejeon 34141, Korea
Author to whom correspondence should be addressed.
Academic Editor: Stefan Dimov
Received: 5 October 2015 / Revised: 7 December 2015 / Accepted: 19 December 2015 / Published: 4 January 2016
(This article belongs to the Collection Laser Micromachining and Microfabrication)
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We describe a new approach for locating the focal position in laser micromachining. This approach is based on a feedback system that uses a charge-coupled device (CCD) camera, a beam splitter, and a mirror to focus a laser beam on the surface of a work piece. We tested the proposed method for locating the focal position by using Zemax simulations, as well as physically carrying out drilling processes. Compared with conventional methods, this approach is advantageous because: the implementation is simple, the specimen can easily be positioned at the focal position, and the dynamically adjustable scan amplitude and the CCD camera can be used to monitor the laser beam’s profile. The proposed technique will be particularly useful for locating the focal position on any surface in laser micromachining. View Full-Text
Keywords: detection of focal position; focal position; laser micromachining detection of focal position; focal position; laser micromachining

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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).

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Cao, B.X.; Bae, M.; Sohn, H.; Choi, J.; Kim, Y.; Kim, J.-O.; Noh, J. Design and Performance of a Focus-Detection System for Use in Laser Micromachining. Micromachines 2016, 7, 2.

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