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Journal: Micromachines, 2026
Volume: 17
Number: 674

Article: An Integrated Physics-Based and Data-Driven Framework for Defect Prediction in Advanced Nanoimprint Lithography Toward Inorganic Semiconductor Patterning
Authors: by Jean Chien and Eric Lee
Link: https://www.mdpi.com/2072-666X/17/6/674

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