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Journal: Micromachines, 2026
Volume: 17
Number: 518
518
Article: An Investigation into the Footing Profile Suppression in (110) Si Anisotropic Etching
Authors: by Zhishen Wang, Guoliang Xie, Gaowei Xu, Genzi Li, Weihu Zhou, Dongzhi Fu, Lingde Kong, Zhiwen Chen and Sheng Liu
Link: https://www.mdpi.com/2072-666X/17/5/518

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