Li, M.; Jiao, W.; Huang, K.; Wang, B.; Dai, Z.; Gao, Y.; Cao, H.; Xie, H.
Design and Fabrication of a Dual-Axis MEMS Electrostatic Micromirror Based on a Planar Comb Drive. Micromachines 2026, 17, 278.
https://doi.org/10.3390/mi17030278
AMA Style
Li M, Jiao W, Huang K, Wang B, Dai Z, Gao Y, Cao H, Xie H.
Design and Fabrication of a Dual-Axis MEMS Electrostatic Micromirror Based on a Planar Comb Drive. Micromachines. 2026; 17(3):278.
https://doi.org/10.3390/mi17030278
Chicago/Turabian Style
Li, Mumu, Wenlong Jiao, Kun Huang, Botao Wang, Zhihua Dai, Yang Gao, Huiliang Cao, and Huikai Xie.
2026. "Design and Fabrication of a Dual-Axis MEMS Electrostatic Micromirror Based on a Planar Comb Drive" Micromachines 17, no. 3: 278.
https://doi.org/10.3390/mi17030278
APA Style
Li, M., Jiao, W., Huang, K., Wang, B., Dai, Z., Gao, Y., Cao, H., & Xie, H.
(2026). Design and Fabrication of a Dual-Axis MEMS Electrostatic Micromirror Based on a Planar Comb Drive. Micromachines, 17(3), 278.
https://doi.org/10.3390/mi17030278