Design, Simulation and High Precision Tracking Control of a Piezoelectric Optical Stabilization Platform
Abstract
1. Introduction
2. Structural Design and Simulation
2.1. Description of Mechanical Architecture
2.2. Theoretical Analysis of the Platform
2.2.1. Static Modeling
2.2.2. Kinetic Model Analysis
2.3. Finite Element Simulation and Its Analysis
3. Control Algorithm Design
3.1. Description of Classical BW Model
3.2. Parameter Identification
4. Platform Open-Loop Test and Tracking Experiment
4.1. Test and Control System Construction
4.2. Open Loop Testing and Performance Evaluation
- (1)
- Stroke and coupling characteristics test
- (2)
- Intrinsic frequency test
- (3)
- Resolution test
4.3. Tracking Performance and Control Optimization
5. Discussion
6. Conclusions
- (1)
- A comprehensive kinematic evaluation of the platform was conducted by establishing an accurate mathematical model and performing simulations and experimental validations.
- (2)
- To improve the positioning and tracking accuracy of the platform, the hysteresis model of PZT is identified by using the HGAPSO algorithm, and the strategy of BW feed-forward model combined with composite PID control is designed. The results show that the platform achieves a motion range of 53.92 μm × 53.76 μm with a maximum resolution of 30 nm and submicron tracking control under low-frequency conditions.
- (3)
- The achievements provide an important reference and guidance for the design and high-frequency control of steady image platforms.
Author Contributions
Funding
Institutional Review Board Statement
Informed Consent Statement
Data Availability Statement
Conflicts of Interest
References
- Shimoni, M.; Haelterman, R.; Perneel, C. Hyperspectral imaging for military and security applications: Combining myriad processing and sensing techniques. IEEE Geosci. Remote Sens. Mag. 2019, 7, 101–117. [Google Scholar] [CrossRef]
- Wu, G.; Li, G.; Yang, Y.; Wei, Y. Design, modeling, and analysis of a new XYθ piezoelectric microstage featuring high amplification ratios and multiple actuation modes. Microsyst. Technol. 2024, 30, 1547–1568. [Google Scholar] [CrossRef]
- Al-Jodah, A.; Shirinzadeh, B.; Ghafarian, M.; Das, T.K.; Pinskier, J.; Tian, Y.; Zhang, D. Modeling and a cross-coupling compensation control methodology of a large range 3-DOF micropositioner with low parasitic motions. Mech. Mach. Theory 2021, 162, 104334. [Google Scholar] [CrossRef]
- Liu, X.; Song, Z.; Li, C.; Tian, L.; Wang, G. Application of adaptive inverse compensation feedforward-MPC feedback control to AFM piezoelectric micro-positioning platform. Smart Mater. Struct. 2024, 33, 075020. [Google Scholar]
- Qian, L.; Wu, D.; Liu, D.; Song, S.; Shi, S.; Gong, W.; Wang, L. Parameter simulation and design of an airborne hyperspectral imaging LiDAR system. Remote Sens. 2021, 13, 5123. [Google Scholar] [CrossRef]
- Xie, C.; Lai, L.; Chen, Y.; Zhu, L. Large stroke electromagnetic redundant actuated six degrees-of-freedom parallel compliant micropositioning stage. J. Micromech. Microeng. 2024, 34, 085007. [Google Scholar] [CrossRef]
- Kim, W.-Y.; Seo, H.-T.; Kim, S.; Kim, K.-S. Practical approach for controlling optical image stabilization system. Int. J. Control Autom. Syst. 2020, 18, 824–833. [Google Scholar] [CrossRef]
- Qin, S.; Zhao, L.; Tian, X.; Li, L.; Liu, S. Research on electronic image stabilization technology of vehicle-mounted remote-controlled weapon station. J. Phys. Conf. Ser. 2021, 2083, 032042. [Google Scholar] [CrossRef]
- Chang, Y.-H.; Lu, C.-J.; Liu, C.-S.; Liu, D.-S.; Chen, S.-H.; Liao, T.-W.; Peng, W.-Y.; Lin, C.-H. Design of miniaturized optical image stabilization and autofocusing camera module for cellphones. Sens. Mater. 2017, 29, 989–996. [Google Scholar]
- Sui, S.; Zhao, T. Active disturbance rejection control for optoelectronic stabilized platform based on adaptive fuzzy sliding mode control. ISA Trans. 2022, 125, 85–98. [Google Scholar] [CrossRef]
- Lu, Y.; Chen, C.; Zhu, J. Design of a focusing mechanism actuated by piezoelectric ceramics for TMA telescope. Sensors 2023, 23, 4610. [Google Scholar] [CrossRef]
- Muraoka, M.; Sanada, S. Displacement amplifier for piezoelectric actuator based on honeycomb link mechanism. Sens. Actuators A Phys. 2010, 157, 84–90. [Google Scholar] [CrossRef]
- Ling, M.; Cao, J.; Jiang, Z.; Zeng, M.; Li, Q. Optimal design of a piezo-actuated 2-DOF millimeter-range monolithic flexure mechanism with a pseudo-static model. Mech. Syst. Signal Process. 2019, 115, 120–131. [Google Scholar] [CrossRef]
- Xiao, R.; Shao, S.; Xu, M.; Jing, Z. Design and analysis of a novel piezo-actuated XYΘz micropositioning mechanism with large travel and kinematic decoupling. Adv. Mater. Sci. Eng. 2019, 2019, 5461725. [Google Scholar] [CrossRef]
- Zhu, W.-L.; Zhu, Z.; Guo, P.; Ju, B.-F. A novel hybrid actuation mechanism based XY nanopositioning stage with totally decoupled kinematics. Mech. Syst. Signal Process. 2018, 99, 747–759. [Google Scholar] [CrossRef]
- Hang, N.T.T.; Son, N.N. Robust tracking control of piezoelectric actuators using super-twisting sliding mode with Bouc-Wen hysteresis model-based enhanced Jaya algorithm. IEEE Access 2025, 13, 15547–15555. [Google Scholar] [CrossRef]
- Xie, S.; Zhong, H.; Zhang, J.; Li, Y.; Xu, S. Modeling, identification, and compensation control of pneumatic muscle hysteresis based on an improved generalized Bouc-Wen model. Measurement 2025, 253, 117512. [Google Scholar] [CrossRef]
- Zhang, G.; Ma, M.; Lin, Y.-J. Stiffness compensation in variable displacement mechanisms of swash plate axial piston pumps utilizing piezoelectric actuators. Materials 2025, 18, 520. [Google Scholar] [CrossRef]
- Qian, R.; Wang, G.; Jiang, M.; Zhang, Y.; Zhai, R.; Wang, W. Frequency-Dependent Bouc-Wen Modeling of Magnetorheological Damper Using Harmonic Balance Approach. Actuators 2024, 13, 297. [Google Scholar] [CrossRef]
- Yin, R.; Xue, B.; Brousseau, E.; Geng, Y.; Yan, Y. Characterizing the electric field- and rate-dependent hysteresis of piezoelectric ceramics shear motion with the Bouc-Wen model. Sens. Actuators A Phys. 2024, 367, 115044. [Google Scholar] [CrossRef]
- Chang, Q.; Gao, X.; Liu, Y.; Deng, J.; Zhang, S.; Chen, W. Development of a cross-scale 6-DOF piezoelectric stage and its application in assisted puncture. Mech. Syst. Signal Process. 2022, 174, 109072. [Google Scholar] [CrossRef]
- Ekbatani, R.Z.; Zheng, J.; Chen, X.; Nikzad, M.; Man, Z. Design and control of a flexure-based dual stage piezoelectric micropositioner. Int. J. Precis. Eng. Manuf. 2024, 25, 1793–1811. [Google Scholar] [CrossRef]
- Kang, S.; Lee, M.G.; Choi, Y.-M. Six degrees-of-freedom direct-driven nanopositioning stage using crab-leg flexures. IEEE/ASME Trans. Mechatron. 2020, 25, 513–525. [Google Scholar] [CrossRef]
- Chen, N.; Tian, C. Design, modeling and testing of a 3-DOF flexible piezoelectric thin sheet nanopositioner. Sens. Actuators A Phys. 2021, 323, 112660. [Google Scholar] [CrossRef]
- Lobontiu, N.; Garcia, E.; Hardau, M.; Bal, N. Stiffness characterization of corner-filleted flexure hinges. Rev. Sci. Instrum. 2004, 75, 4896–4905. [Google Scholar] [CrossRef]
- Li, H.; Tang, H.; Li, J.; Chen, X. Design, fabrication, and testing of a 3-DOF piezo fast tool servo for microstructure machining. Precis. Eng. 2021, 72, 756–768. [Google Scholar] [CrossRef]
- Dong, G.; Sun, S.; Kong, X.; Chen, X.; Yin, T.; Wu, N.; Huang, P.; Wang, Z. Design and analysis of a new micro-positioning platform for ceramic material testing. Microsyst. Technol. 2024, 30, 55–64. [Google Scholar] [CrossRef]
- Zhou, M.; Dai, Z.; Zhou, Z.; Liu, X.; Cao, T.; Li, Z. Modeling, identification, and high-speed compensation study of dynamic hysteresis nonlinearity for piezoelectric actuator. J. Intell. Mater. Syst. Struct. 2024, 35, 822–844. [Google Scholar] [CrossRef]
- Lin, J.; Qi, C.; Xue, Y.; Wang, Y.; Liu, X.; Gao, F. A method toward comprehensive identification for piezoelectric dynamic system with multimodal hysteresis and uncertainty compensation. IEEE Trans. Instrum. Meas. 2024, 73, 1–10. [Google Scholar] [CrossRef]










| Maximum Size (mm) | Travel Range (μm) | Intrinsic Frequency (Hz) | Parasitic Coupling | Positioning Accuracy (μm) |
|---|---|---|---|---|
| 130 × 130 × 20 | ≥50 × 50 | ≥300 | ≤2.5% | <1 |
| Material | Yield Strength (Mpa) | Young’s Modulus (Gpa) | Density (g/cm3) | Poisson’s Ratio |
|---|---|---|---|---|
| 7075Al | 503 | 71 | 2.81 | 0.33 |
| Model | Dimension (mm) | Drive Voltage (V) | Maximum Displacement (μm) | Stiffness (N/μm) | Resonant Frequency (KHz) | Thrust (N) |
|---|---|---|---|---|---|---|
| Pst150/5 × 5/20H | 5.1 × 5.1 × 18 | 0~150 | 20 | 60 | 50 | 1600 |
| Parameter | t | b0 | b1 | b2 | td | l1,l2 |
| Value (mm) | 1 | 13 | 2.05 | 6 | 0.9 | 6 |
| Parameter | l3 | l | la | lb | lc | ld |
| Value (mm) | 2.5 | 3 | 27 | 30 | 3.3 | 17 |
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© 2026 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license.
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Yan, Y.; Cui, C.; Cui, J.; Zhang, F.; Chen, K.; Huang, J.; Xie, H.; Zhang, D. Design, Simulation and High Precision Tracking Control of a Piezoelectric Optical Stabilization Platform. Micromachines 2026, 17, 87. https://doi.org/10.3390/mi17010087
Yan Y, Cui C, Cui J, Zhang F, Chen K, Huang J, Xie H, Zhang D. Design, Simulation and High Precision Tracking Control of a Piezoelectric Optical Stabilization Platform. Micromachines. 2026; 17(1):87. https://doi.org/10.3390/mi17010087
Chicago/Turabian StyleYan, Yonggang, Can Cui, Jianjun Cui, Fuming Zhang, Kai Chen, Junjie Huang, Hang Xie, and Dengpan Zhang. 2026. "Design, Simulation and High Precision Tracking Control of a Piezoelectric Optical Stabilization Platform" Micromachines 17, no. 1: 87. https://doi.org/10.3390/mi17010087
APA StyleYan, Y., Cui, C., Cui, J., Zhang, F., Chen, K., Huang, J., Xie, H., & Zhang, D. (2026). Design, Simulation and High Precision Tracking Control of a Piezoelectric Optical Stabilization Platform. Micromachines, 17(1), 87. https://doi.org/10.3390/mi17010087
