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Journal: Micromachines, 2025
Volume: 16
Number: 1073
1073
Article: Hybrid Inductively Coupled Plasma and Computer-Controlled Optical Surfacing Polishing for Rapid Fabrication of Damage-Free Ultra-Smooth Surfaces
Authors: by Wei Li, Peiqi Jiao, Dawei Luo, Qiang Xin, Bin Fan, Xiang Wu, Bo Gao and Qiang Chen
Link: https://www.mdpi.com/2072-666X/16/9/1073

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