Li, W.; Jiao, P.; Luo, D.; Xin, Q.; Fan, B.; Wu, X.; Gao, B.; Chen, Q.
Hybrid Inductively Coupled Plasma and Computer-Controlled Optical Surfacing Polishing for Rapid Fabrication of Damage-Free Ultra-Smooth Surfaces. Micromachines 2025, 16, 1073.
https://doi.org/10.3390/mi16091073
AMA Style
Li W, Jiao P, Luo D, Xin Q, Fan B, Wu X, Gao B, Chen Q.
Hybrid Inductively Coupled Plasma and Computer-Controlled Optical Surfacing Polishing for Rapid Fabrication of Damage-Free Ultra-Smooth Surfaces. Micromachines. 2025; 16(9):1073.
https://doi.org/10.3390/mi16091073
Chicago/Turabian Style
Li, Wei, Peiqi Jiao, Dawei Luo, Qiang Xin, Bin Fan, Xiang Wu, Bo Gao, and Qiang Chen.
2025. "Hybrid Inductively Coupled Plasma and Computer-Controlled Optical Surfacing Polishing for Rapid Fabrication of Damage-Free Ultra-Smooth Surfaces" Micromachines 16, no. 9: 1073.
https://doi.org/10.3390/mi16091073
APA Style
Li, W., Jiao, P., Luo, D., Xin, Q., Fan, B., Wu, X., Gao, B., & Chen, Q.
(2025). Hybrid Inductively Coupled Plasma and Computer-Controlled Optical Surfacing Polishing for Rapid Fabrication of Damage-Free Ultra-Smooth Surfaces. Micromachines, 16(9), 1073.
https://doi.org/10.3390/mi16091073